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  • NX10-AFM
    革新的研究に最短の道程 Park NX10
  • SmartScan-AFM
    簡単&パワフルシンプルな3ステップの操作 Park SmartScan
  • NX20-AFM
    不良解析や大型試料を用いた研究に付加価値の高い選択肢l Park NX20
  • NX-wafer-AFM
    インラインのウエハ検査とメトロロジーの為の全自動AFM Park NX-Wafer
our clients
 

A revolutionary all-in-one system for 3D Metrology

Automatic Tip Exchange (ATX)

The ATX automatically locates tips by pattern recognition and uses a novel magnetic approach to disengage a used tip and pick up a new tip, with an incredible 99.9% success rate. The laser spot is then automatically optimized along the X- and Y-axis by motorized positioning knobs.

automatic-tip-exchanger

awh2

Automatic Wafer Handler (EFEM or FOUP)

The NX-3DM can be configured for various automatic wafer handlers, such as EFEM and FOUP. The high-precision, robotic handling arm ensures users get fast and reliable wafer measurements every time.


Ionization System for a more stable scanning

Our innovative ionization system quickly and effectively removes electrostatic charges in thesample’s environment. Since the system always generates and maintains the ideal balance of positive and negative ions, it can create an extremely stably chargedenvironment with negligible contamination from the surrounding area and minimize the risk of accidental electrostatic charge during sample handling.

Ionization-System
 

Atomic Force Microscopy | AFM Microscope | Park Systems