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  • Park AFM
    電気特性モード
    コンダクタンス、サンプル抵抗、その他の電気的および形状特性に関する正確な情報を
    必要とするユーザー向けに、Parkは様々な電気特性モードを備えています。

Conductive AFM

Probing the Local Electronic Structure of a Sample’s Surface

Conductive AFM simultaneously images topography and conductivity of the sample surface. The local conductivity of a sample is acquired by placing a conducting cantilever on the sample surface and applying a bias between the cantilever and the sample. Conductive AFM detects the resulting current flow, which can be as low as a few pA. The typically low level of current measurement requires a detection scheme with a current noise level of sub pA. Park Systems offers three current sensing options, detecting current signals from sub pA to mA.

  • Ulta-Low Noise Conductive AFM(ULCA): < 0.1 pA noise level
  • Variable Enhanced Conductive AFM(VECA): < 0.3 pA noise level
  • Internal Conductive AFM:< 1 pA noise level
conductive-afm-f1

Schematic diagram of the Park AFMs Conductive AFM system

conductive-sram

The contrast on the Conductive AFM image indicates differences in the electrical property of the raised dots.
The topography of a DRAM surface and Conductive AFM image with various sample bias.

SRAM
Scan size: 1µm
Using Probe: CDT-ContR
Imaged on a Park XE-Series using Conductive Mode.
 

Electrical Modes