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  • Park AFM
    電気特性モード
    コンダクタンス、サンプル抵抗、その他の電気的および形状特性に関する正確な情報を
    必要とするユーザー向けに、Parkは様々な電気特性モードを備えています。

Electrostatic Force Microscopy (EFM)

High Resolution and High Sensitivity Imaging of Electrostatic Force

Almost every surface property measured by AFM is acquired by the process depicted. EFM measurements follow the same procedure. For EFM, the sample surface properties would be electrical properties and the interaction force will be the electrostatic force between the biased tip and sample. However, in addition to the electrostatic force, the van der Waals forces between the tip and the sample surface are always present. The magnitude of these van der Waals forces change according to the tip-sample distance, and are therefore used to measure the surface topography.

efm-fuel-cell

(a) Topography (b) EFM Amplitude at -1V sample bias

Fuel Cell
Scan size:20 µm 
Using Probe: NSC14 Cr-Au
Imaged on a Park XE-Series using EFM Mode.
 

Electrical Modes