|お問い合わせ|
  • Park AFM
    電気特性モード
    コンダクタンス、サンプル抵抗、その他の電気的および形状特性に関する正確な情報を
    必要とするユーザー向けに、Parkは様々な電気特性モードを備えています。

Scanning Capacitance Microscopy (SCM)

High Resolution and High Sensitivity Imaging of Charge Distribution

Our SCM mode provides doping concentration information over the sample surface by measuring the capacitance change between tip and sample. the module enables a variable resonator frequency, which allows a wide RF bandwidth capable of monitoring a large range of doping concentrations by selecting the most sensitive frequency of the resonator for a specific doping range.

 

 
quickstep-scm

The n-doped silicon sample has areas of varying dopant concentration, imaged by Park SCM.
The doping concentration of less than an order of magnitude is clearly distinguishable.

N-doped silicon
Scan size: 20 µm
Using Probe: PPP-EFM
Imaged on a Park NX20 using SCM Mode.
 

Electrical Modes