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  • Park AFM
    ナノメカニカルモード
    メカニカルスキャンモードを用いることで、サンプルの機械的特性を簡単に測定できます。
    各機能がParkのトレードマークである正確さを備えているため、信頼できるデータを収集可能です。

Nanolithography

Advanced Vector Nanolithography Using Closed Loop Scan System

The Nanolithography mode allows you to manipulate and create patterning on the sample surface through applied force or voltage. Tip position for lithography can be easily controlled by importing your own vector drawings or raster (bitmap) images.

nanolithograpy-f1

Pattern created on the surface by plowing the surface with the tip (a) and by changing the surface with applied bias (b)

 
nanolithograpy-f2

Vector Nanolithography. The image is generated in vector by applying negative voltage between -5 and -10 V.
Scanning rate was varied between 1 and 0.1 µm/s. The height of deposited oxide is about 2-4 nm.

Si
Scan size: 4.5µm
Using Probe: Contsc Pt
Imaged on a Park XE-Series using XEL mode.
 

Nanomechanical Modes